Semiconductor Materials
Acid-Labile Acetal Methacrylate
SCP-RM-105Acetal-protected (acid-cleavable) methacrylateElectronic Grade (Low Metal Ion)
Low-activation-energy protecting monomer that deprotects cleanly under photogenerated acid for crisp solubility switching. Improves resist sensitivity and post-exposure-bake latitude in KrF and ArF formulations.
Key applications
- Chemically amplified resist formulation
- Low-Ea protecting groups
- Sensitivity & PEB latitude
Specifications
- Product Code
- SCP-RM-105
- Chemistry Class
- Acetal-protected (acid-cleavable) methacrylate
- Product Family
- Photoresist Monomers
- Product Line
- Semiconductor Materials
- Grade
- Electronic Grade (Low Metal Ion)
Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.
Documentation provided
Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability
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