Semiconductor Materials
Cyclic-Sulfonate Polar Methacrylate
SCP-RM-102Oxathia-bicyclic sultone methacrylateElectronic Grade (Low Metal Ion)
Polar cycloaliphatic monomer that raises etch resistance and substrate adhesion in chemically amplified resists. The fused cyclic-sulfonate ring provides controlled dissolution behaviour and pattern-collapse resistance at aggressive pitches.
Key applications
- Chemically amplified resists (CAR)
- Adhesion & dissolution control
- Etch-resistant resist matrices
Specifications
- Product Code
- SCP-RM-102
- Chemistry Class
- Oxathia-bicyclic sultone methacrylate
- Product Family
- Photoresist Monomers
- Product Line
- Semiconductor Materials
- Grade
- Electronic Grade (Low Metal Ion)
Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.
Documentation provided
Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability
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