Semiconductor Materials
Norbornane Fluoroalcohol Methacrylate II
SCP-RM-104HFA-norbornyl methacrylate (extended tether)Electronic Grade (Low Metal Ion)
Extended-tether analogue of our norbornane fluoroalcohol series, offering additional conformational freedom for dissolution-rate tuning. Supports resist formulators balancing sensitivity, contrast and etch selectivity at advanced nodes.
Key applications
- Advanced-node photoresists
- Dissolution-rate tuning
- High etch selectivity
Specifications
- Product Code
- SCP-RM-104
- Chemistry Class
- HFA-norbornyl methacrylate (extended tether)
- Product Family
- Photoresist Monomers
- Product Line
- Semiconductor Materials
- Grade
- Electronic Grade (Low Metal Ion)
Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.
Documentation provided
Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability
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