Semiconductor Materials
Cyclic Sulfonium Photoacid Generator I
SCP-PG-204Aryl-tetrahydrothiophenium salt, fluoroether sulfonate anionElectronic Grade (Low Metal Ion)
Cyclic sulfonium salt paired with a bulky fluoroether sulfonate anion for ultra-short acid diffusion lengths. Engineered for EUV and high-NA patterning where stochastic control and line-width roughness dominate yield.
Key applications
- EUV patterning
- Ultra-low acid diffusion
- Stochastics / LWR control
Specifications
- Product Code
- SCP-PG-204
- Chemistry Class
- Aryl-tetrahydrothiophenium salt, fluoroether sulfonate anion
- Product Family
- Photoacid Generators
- Product Line
- Semiconductor Materials
- Grade
- Electronic Grade (Low Metal Ion)
Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.
Documentation provided
Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability
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