Semiconductor Materials
Diaryliodonium Photoacid Generator I
SCP-PG-203Diaryliodonium perfluoroalkanesulfonateElectronic Grade (Low Metal Ion)
Ionic iodonium PAG producing a low-diffusion perfluoroalkanesulfonic acid for tightly controlled image blur. Excellent thermal stability supports wide post-apply and post-exposure bake windows in KrF/ArF processes.
Key applications
- KrF / ArF lithography
- Controlled acid diffusion
- Wide bake-window processes
Specifications
- Product Code
- SCP-PG-203
- Chemistry Class
- Diaryliodonium perfluoroalkanesulfonate
- Product Family
- Photoacid Generators
- Product Line
- Semiconductor Materials
- Grade
- Electronic Grade (Low Metal Ion)
Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.
Documentation provided
Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability
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