Semiconductor Materials
Imide-Sulfonate Photoacid Generator
SCP-PG-202N-sulfonyloxyimide (non-ionic), perfluoroalkyl acidElectronic Grade (Low Metal Ion)
Naphthalimide-type non-ionic PAG generating a strong perfluorinated sulfonic acid on exposure. High thermal stability and clean acid yield make it a workhorse for high-sensitivity deep-UV and e-beam resist systems.
Key applications
- High-sensitivity resists
- E-beam & DUV lithography
- Thermally stable PAG
Specifications
- Product Code
- SCP-PG-202
- Chemistry Class
- N-sulfonyloxyimide (non-ionic), perfluoroalkyl acid
- Product Family
- Photoacid Generators
- Product Line
- Semiconductor Materials
- Grade
- Electronic Grade (Low Metal Ion)
Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.
Documentation provided
Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability
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