Semiconductor Materials
Copper Corrosion Inhibitor
SCP-CA-401Methylated benzotriazole (azole passivator)Electronic Grade (CMP-Compatible Purity)
Selective copper-passivating azole for CMP slurries and post-CMP cleaning chemistry. Forms a self-limiting Cu(I) complex layer that suppresses galvanic corrosion while preserving removal-rate selectivity.
Key applications
- Cu CMP slurry additive
- Post-CMP cleaning
- Interconnect corrosion control
Specifications
- Product Code
- SCP-CA-401
- Chemistry Class
- Methylated benzotriazole (azole passivator)
- Product Family
- CMP Additives
- Product Line
- Semiconductor Materials
- Grade
- Electronic Grade (CMP-Compatible Purity)
Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.
Documentation provided
Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability
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