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Lithography Materials

Acid-Labile Acetal Monomer

SCP-LM-103Protected (acid-cleavable) methacrylate

Acid-labile monomer for chemically amplified resist formulation and adhesion control.

Key applications

  • Photoresist formulation
  • Adhesion promoter
  • Process optimization

Specifications

Product Code
SCP-LM-103
Chemistry Class
Protected (acid-cleavable) methacrylate
Product Line
Lithography Materials
Grade
High-purity, electronic grade

Specifications are indicative. Full Certificate of Analysis and Safety Data Sheet are provided with every order.

Documentation provided

Certificate of Analysis (COA)Safety Data Sheet (SDS)Technical InformationBatch Traceability